On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector

Hong Cai; Md Hazwani Khairy; Rachel Chen Fang Ang; Linfang Xu; Doris Keh Ting Ng; Nanxi Li; Zhonghua Gu; Anmin Kong; Weiguo Chen; Wen Wei Seit; Eva Wai Leong Ching; Norhanani Jaafar; Huanhuan Wang; Landobasa Y. M. Tobing; Leh Woon Lim; Qingxin Zhang; Lennon Yao Ting Lee

doi:10.1117/12.2650363

13 March 2023 On-chip CO₂ sensor integrated with MEMS emitter and pyroelectric detector

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y. M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee

Author Affiliations +

Proceedings Volume 12426, Silicon Photonics XVIII; 124260H (2023) https://doi.org/10.1117/12.2650363
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

A demonstration of an on-chip CO₂ gas sensor is reported. It is constructed by the integration of a MEMS-based thermal emitter, a scandium-doped aluminum nitride (ScAlN) based pyroelectric detector, and a sensing channel built on Si substrate. The integrated sensor has a small footprint of 13mm × 3mm (L×W), achieved by the replacement of bulky bench-top mid-IR source and detectors with MEMS-based thermal emitter and ScAlN-based pyroelectric detector, with their footprints occupying 3.15 mm × 3 mm and 3.45 mm × 3 mm, respectively. In addition, the performance of the integrated sensor in detecting CO₂ of various concentrations in N₂ ambient is also studied. The results indicate that the pyroelectric detector responds linearly to the CO₂ concentration. The integration of MEMS emitter, thermal pathway substrate, and pyroelectric detector, realized through CMOS compatible process, shows the potential for massdeployment of gas sensors in environmental sensing networks.

Conference Presentation

Citation Download Citation

Hong Cai, Md Hazwani Khairy, Rachel Chen Fang Ang, Linfang Xu, Doris Keh Ting Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y. M. Tobing, Leh Woon Lim, Qingxin Zhang, and Lennon Yao Ting Lee "On-chip CO₂ sensor integrated with MEMS emitter and pyroelectric detector", Proc. SPIE 12426, Silicon Photonics XVIII, 124260H (13 March 2023); https://doi.org/10.1117/12.2650363

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available