Presentation + Paper
15 March 2023 Machine learning for design optimizations and prediction of optical chip performance
K. Yadav, S. Bidnyk, A. Balakrishnan
Author Affiliations +
Proceedings Volume 12438, AI and Optical Data Sciences IV; 124380E (2023) https://doi.org/10.1117/12.2647618
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Artificial intelligence (AI) and machine learning (ML) have tremendous potential for increasing the scale and reach of the photonics industry. We present how the use of AI/ML has revolutionized the field of photonic integrated circuit design and manufacturing, and resulted in mass deployments of high-performance optical chips for multiple classes of datacom and telecom applications. First, we discuss our use of a deep neural network multivariate regression model to optimize the individual design parameters of hundreds of optical chips on a given mask. This work successfully addresses the systematic processing variations within a wafer, resulting in an unprecedented homogeneity of performance of optical chips in a high-volume production environment. Second, we present our approach of using ML to predict the performance of optical devices by wafer probing. This novel approach eliminates the expensive and time-consuming process of optical chip testing and instead relies on a wafer probe measurement to infer the performance of hundreds of chips on a wafer. We discuss the complexity of the problem of predicting the performance in multi-dimensional parameter space, the inherent challenges that cannot be overcome by traditional methods, and the reasons why ML is an essential tool to solve this problem. The support vector machine (SVM) that we developed performs nonlinear binary classification based on a regression from the probe measurement, allowing unprecedented control over our process, including in-situ monitoring of wafer fabrication and real-time process adjustments, and thus achieving consistently high performance of optical chips at high production volumes.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Yadav, S. Bidnyk, and A. Balakrishnan "Machine learning for design optimizations and prediction of optical chip performance", Proc. SPIE 12438, AI and Optical Data Sciences IV, 124380E (15 March 2023); https://doi.org/10.1117/12.2647618
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KEYWORDS
Semiconducting wafers

Design and modelling

Machine learning

Wafer-level optics

Integrated optics

Optics manufacturing

Fabrication

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