Design and simulation of anti-reflecting nanostructure for visible shortwave infrared focal plane array detectors

Xiaoyuan Yu; Yizhen Yu; Xiumei Shao; Yu Tian; Chunlei Yu; Haimei Gong

doi:10.1117/12.2666003

31 January 2023 Design and simulation of anti-reflecting nanostructure for visible shortwave infrared focal plane array detectors

Xiaoyuan Yu, Yizhen Yu, Xiumei Shao, Yu Tian, Chunlei Yu, Haimei Gong

Author Affiliations +

Proceedings Volume 12505, Earth and Space: From Infrared to Terahertz (ESIT 2022); 125050U (2023) https://doi.org/10.1117/12.2666003
Event: Earth and Space: From Infrared to Terahertz (ESIT 2022), 2022, Nantong, China

Abstract

InGaAs/InP Focal Plane Array (FPA) photodetector, which responses from 400nm-1700nm, is widely used in many applications, while its quantum efficiency in visible spectrum is commonly lower than Shortwave Infrared (SWIR) spectrum. In order to improve the quantum efficiency in visible spectrum, new methods need to be applied. Based on Mie scattering, sub-wavelength nanostructure arrays have been demonstrated that can be used as anti-reflecting mechanism in visible spectrum. Here we present the design and simulation of the parameters of nanostructure arrays, which aims at suppressing the reflection in visible spectrum, thus the transmittance of visible light from the back-illuminated side gets improved. Simulation results prove that designed nanostructure arrays can decrease the reflectance in visible spectrum, and integrating designed nanostructure arrays on ultra-thin back-illuminated layer can improve the transmittance, which improves the quantum efficiency of photodetector.

Citation Download Citation

Xiaoyuan Yu, Yizhen Yu, Xiumei Shao, Yu Tian, Chunlei Yu, and Haimei Gong "Design and simulation of anti-reflecting nanostructure for visible shortwave infrared focal plane array detectors", Proc. SPIE 12505, Earth and Space: From Infrared to Terahertz (ESIT 2022), 125050U (31 January 2023); https://doi.org/10.1117/12.2666003

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