Paper
9 January 2023 Research on temperature and thermal stress in atmospheric plasma machining based on arc method
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Abstract
In order to explore the dynamic variation rule of temperature distribution on surface of optical element, the temperaturerise effect of atmospheric plasma processing was analyzed by using simulation model, and the corresponding thermal stress mathematical model was established for fused silica. On this basis, the experiment of plasma processing was carried out, the dynamic variation rule of temperature distribution on surface of four materials of aluminum, aluminum alloy, SiC and fused silica during the atmospheric plasma processing was analyzed, and the verification and comparison with the simulation results were carried out. The results show that the arc discharge atmospheric plasma polishing technology can effectively remove the damage layer of fused silica optical element by physical polishing, and the simulation model can provide data support for the atmospheric plasma processing technology.
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Yuwei Peng, Yingxue Xi, Zirong Song, Aifeng He, Changming Zhang, Kezheng Ning, and Weiguo Liu "Research on temperature and thermal stress in atmospheric plasma machining based on arc method", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 125072I (9 January 2023); https://doi.org/10.1117/12.2656509
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KEYWORDS
Atmospheric plasma

Plasma

Silica

Temperature metrology

Aluminum

Surface finishing

Polishing

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