Analysis and detection of optical path error of large aperture plane mirror

Xinrui Wang; Yongxing Yang; Jinpeng Li; Xinhua Lai; Runfu Peng; Qitong Li

doi:10.1117/12.2646978

20 January 2023 Analysis and detection of optical path error of large aperture plane mirror

Xinrui Wang, Yongxing Yang, Jinpeng Li, Xinhua Lai, Runfu Peng, Qitong Li

Proceedings Volume 12559, AOPC 2022: Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing; 1255905 (2023) https://doi.org/10.1117/12.2646978
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

When the Ritchey-Common method is used for high-precision surface shape detection of large-aperture plane mirrors, a reflective spherical mirror needs to be used to build the detection optical path. When building the detection optical path, the plane mirror and the spherical mirror has a large diameter and a long detection optical path, so there are various artificial adjustment errors. In order to solve the problems of high-precision surface shape detection of large-diameter plane mirrors, two common adjustment errors of eccentricity and tilt during optical path detection are analyzed. By using optical software to build a large-diameter plane mirror detection optical path model, set different eccentricity and tilt errors to obtain the system wave aberration, solve the system wave aberration data to obtain the plane mirror shape to be measured, and compare it with the preset standard surface shape. The simulation of a 2m plane mirror shows that the difference between the two Ritchey angles is in the range of 11°~30°. When the eccentricity error is controlled within 5% of the aperture and the tilt error is controlled within 1°, the surface shape recovery results are different from the standard surface RMS by the order of 10^-3λ. Based on the above error simulation analysis, the actual Φ2m plane mirror shape detection is guided, and the results show that the RMS of the plane mirror reaches 0.0238λ, and the PV is 0.1629λ (λ=0.6328um). The purpose of this paper is to reveal the influence of the optical path adjustment error on the shape of the 2m plane mirror, so as to control the error of the plane mirror shape detection of the actual large-aperture mirror.

Citation Download Citation

Xinrui Wang, Yongxing Yang, Jinpeng Li, Xinhua Lai, Runfu Peng, and Qitong Li "Analysis and detection of optical path error of large aperture plane mirror", Proc. SPIE 12559, AOPC 2022: Novel Optical Design; and Optics Ultra Precision Manufacturing and Testing, 1255905 (20 January 2023); https://doi.org/10.1117/12.2646978

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KEYWORDS

Mirrors

Error analysis

Shape analysis

Astronomical imaging

Spherical lenses

Computer simulations

Data modeling

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