Research on TiO2/NiO heterogeneous composite thin film ultraviolet detector based on self-depletion effect

Yue Zhu; Sen Wang; Wenshuo Wang; Yunpeng Deng; Jia Yuan; Lixiu Fang; Fuhan Lin; Kexin Zhang; Xinyuan Wang; Bowen Chu; Xin Li

doi:10.1117/12.2675361

25 May 2023 Research on TiO₂/NiO heterogeneous composite thin film ultraviolet detector based on self-depletion effect

Yue Zhu, Sen Wang, Wenshuo Wang, Yunpeng Deng, Jia Yuan, Lixiu Fang, Fuhan Lin, Kexin Zhang, Xinyuan Wang, Bowen Chu, Xin Li

Author Affiliations +

Proceedings Volume 12636, Third International Conference on Machine Learning and Computer Application (ICMLCA 2022); 126361D (2023) https://doi.org/10.1117/12.2675361
Event: Third International Conference on Machine Learning and Computer Application (ICMLCA 2022), 2022, Shenyang, China

Abstract

In this paper, a TiO₂/NiO heterogeneous composite thin film ultraviolet detector based on the dark state self-depletion effect was designed and fabricated. The N-type TiO₂ film is prepared by the sol-gel method, and P-type NiO thin films and Ni/Au alloy electrodes are simultaneously prepared by a unique one-step oxidation method. Compared with devices based on a single thin film, the dark current of heterogeneous thin film devices is greatly improved, and performances such as responsivity and response/recovery speed are also improved. The dark current of the device with the best comprehensive performance is only 0.033 nA under 6 V bias, the peak spectral response reaches 181.9 A/W at 280 nm wavelength, and the response recovery time is 717 ms and 598 ms, respectively. This research shows that the heterogeneous composite thin-film ultraviolet detector based on the self-depletion effect and other mechanisms has significantly improved comprehensive performance and has more application potential.

Citation Download Citation

Yue Zhu, Sen Wang, Wenshuo Wang, Yunpeng Deng, Jia Yuan, Lixiu Fang, Fuhan Lin, Kexin Zhang, Xinyuan Wang, Bowen Chu, and Xin Li "Research on TiO₂/NiO heterogeneous composite thin film ultraviolet detector based on self-depletion effect", Proc. SPIE 12636, Third International Conference on Machine Learning and Computer Application (ICMLCA 2022), 126361D (25 May 2023); https://doi.org/10.1117/12.2675361

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