A new march test for FinFET memory functional fault detection

Ruikun Wang; Zhihong Huang; Gang Cai; Zhong Yu

doi:10.1117/12.2668418

28 June 2023 A new march test for FinFET memory functional fault detection

Ruikun Wang, Zhihong Huang, Gang Cai, Zhong Yu

Proceedings Volume 12720, 2022 Workshop on Electronics Communication Engineering; 1272007 (2023) https://doi.org/10.1117/12.2668418
Event: 2022 Workshop on Electronics Communication Engineering (WECE 2022), 2022, Xi'an, China

Abstract

FinFET (Fin Field-Effect Transistor) technology is widely used in advanced transistor manufacturing process due to its lower leakage current, smaller short-channel effect, and lower power consumption. However, this special physical structure is very susceptible to manufacturing defects, which makes the FinFET memory prone to functional faults. Therefore, an efficient fault detection method is very important for the defect detection of FinFET memory. A detection algorithm called March FRD for FinFET memory faults is proposed in this paper. This paper summarizes the FinFET functional fault model, analyzes the corresponding coverage conditions, and verifies the correctness of the algorithm. March FRD performs well in detecting resistance dynamic faults, and its total fault coverage reaches 91.7%, which is significantly better than other existing March tests.

Citation Download Citation

Ruikun Wang, Zhihong Huang, Gang Cai, and Zhong Yu "A new march test for FinFET memory functional fault detection", Proc. SPIE 12720, 2022 Workshop on Electronics Communication Engineering, 1272007 (28 June 2023); https://doi.org/10.1117/12.2668418

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