Paper
28 June 2023 Design and analysis of bridge-lever composite flexure mechanisms supporting parallel tip-tilt motion stages
Jian Yang, Peng Yan
Author Affiliations +
Proceedings Volume 12720, 2022 Workshop on Electronics Communication Engineering; 127200R (2023) https://doi.org/10.1117/12.2675030
Event: 2022 Workshop on Electronics Communication Engineering (WECE 2022), 2022, Xi'an, China
Abstract
In this work, a compliant parallel tip-tilt motion stage design is proposed by employing novel bridge-lever composite mechanisms which can transmit the translational motion to the rotational motion. The variable axis flexure hinges are introduced in this particular design to achieve better translational-angular coupling, which improve the bearing capability and the motion range. Furthermore, a linear analytical model is also developed to describe the translational-angular behavior of the proposed mechanisms. Finally, finite element simulations are conducted to verify the analytical results and illustrate the dynamic characteristics of the tip-tilt stage. The results on the proposed design show significant potentials in applications such as active optics which require large range and high precision pointing, positioning and alignment of optical beams.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jian Yang and Peng Yan "Design and analysis of bridge-lever composite flexure mechanisms supporting parallel tip-tilt motion stages", Proc. SPIE 12720, 2022 Workshop on Electronics Communication Engineering, 127200R (28 June 2023); https://doi.org/10.1117/12.2675030
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KEYWORDS
Compliance

Analytic models

Design and modelling

Bridges

Mode shapes

Modal analysis

Simulations

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