Active-matrix micro-LED display using MoS2 TFTs

Jong-Hyun Ahn

doi:10.1117/12.3004040

13 March 2024 Active-matrix micro-LED Display using MoS₂ TFTs

Jong-Hyun Ahn

Proceedings Volume 12906, Light-Emitting Devices, Materials, and Applications XXVIII; 129060J (2024) https://doi.org/10.1117/12.3004040
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

The integration of transition metal chalcogenides, such as MoS₂, with III-V compound semiconductors has posed significant challenges in the implementation of two-dimensional materials in optoelectronics applications. In this presentation, we propose a breakthrough method for directly growing molybdenum disulfide (MoS₂) on III-V compound semiconductors, compatible with a batch microfabrication process. By synthesizing a thin film of MoS2 on a gallium- nitride-based epitaxial wafer, we successfully developed a thin film transistor array. In addition, we achieved seamless monolithic integration of the MoS₂ thin film transistor with micro-light-emitting-diode (micro-LED) devices, resulting in a state-of-the-art active-matrix micro-LED display. This novel approach paves the way for promising heterogeneous integration, combining established semiconductor technology with emerging two-dimensional materials, ultimately enabling high-performance optoelectronic systems.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jong-Hyun Ahn "Active-matrix micro-LED Display using MoS₂ TFTs", Proc. SPIE 12906, Light-Emitting Devices, Materials, and Applications XXVIII, 129060J (13 March 2024); https://doi.org/10.1117/12.3004040

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available