A MEMS fiber-optic hydrophone based on extrinsic Fabry-Perot interferometer for underwater acoustic sensing

Zheng Liu; Gang Liu; Fuyin Wang; Shuidong Xiong; Ji Xia

doi:10.1117/12.2688275

6 November 2023 A MEMS fiber-optic hydrophone based on extrinsic Fabry-Perot interferometer for underwater acoustic sensing

Zheng Liu, Gang Liu, Fuyin Wang, Shuidong Xiong, Ji Xia

Author Affiliations +

Proceedings Volume 12921, Third International Computing Imaging Conference (CITA 2023); 129211A (2023) https://doi.org/10.1117/12.2688275
Event: Third International Computing Imaging Conference (CITA 2023), 2023, Sydney, Australia

Abstract

With the advancements in fiber-optic sensing systems, traditional long-arm fiber-optic interferometric acoustic sensors are unable to meet the requirements of miniaturization due to the sensor's volume. However, Microelectromechanical Systems (MEMS) boast numerous advantages, including small size, low cost, high reliability, and mass production. By combining MEMS technology with fiber-optic sensors, it is feasible to achieve the miniaturization of Fiber-Optic Hydrophones (FOH). This paper proposes and experimentally demonstrates a miniaturized MEMS FOH based on the extrinsic Fabry-Perot interferometer (EFPI) sensor. It has been demonstrated that this miniatured EFPI sensor is endowed with high sensitivity in the low-frequency range. By filling the EFPI cavity with liquid, the MEMS FOH sensor can withstand ultra-high hydrostatic pressures and theoretically it can be operated in infinite-depth waters. The acoustic pressure to be detected is interrogated using a phase-shift demodulation based on a five-step phase shift method, which includes spectral envelope elimination, ellipse fitting, and phase shift signal extraction. Simulation analysis and experimental results indicate that the sensor has a good linear relationship between sound pressure and interferometric phase, with an underwater sensitivity of up to -160 dB re rad / μPa and the ability to operate at a working pressure of up to 66 MPa, corresponding to a water depth of 6000 m. With the aforementioned properties, the MEMS FOH has a wide range of applications, including high-performance sonar buoys, earthquake detection, underwater unmanned detection platforms, and other fields.

Citation Download Citation

Zheng Liu, Gang Liu, Fuyin Wang, Shuidong Xiong, and Ji Xia "A MEMS fiber-optic hydrophone based on extrinsic Fabry-Perot interferometer for underwater acoustic sensing", Proc. SPIE 12921, Third International Computing Imaging Conference (CITA 2023), 129211A (6 November 2023); https://doi.org/10.1117/12.2688275

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KEYWORDS

Microelectromechanical systems

Fiber optics

Sensors

Fiber optics sensors

Silicon

Fabry–Perot interferometry

Semiconducting wafers

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