Surface topography reconstruction method based on modulation of white light interference signal

Weiwei Chen; Yupeng Xiong; Shanyong Chen

doi:10.1117/12.2691822

6 November 2023 Surface topography reconstruction method based on modulation of white light interference signal

Weiwei Chen, Yupeng Xiong, Shanyong Chen

Proceedings Volume 12921, Third International Computing Imaging Conference (CITA 2023); 129214H (2023) https://doi.org/10.1117/12.2691822
Event: Third International Computing Imaging Conference (CITA 2023), 2023, Sydney, Australia

Abstract

In modern optical detection, the vertical resolution of three-dimensional (3-D) topography obtained by White Light Interferometer (WLI) can reach sub-nanometer level. Under the same detection environment, optical system and scanning sampling system, the quality of coherent peak extraction algorithm directly determines the measurement accuracy. After decomposing and analyzing the representation form of WLI signal, this paper proposes a surface topography reconstruction method based on the modulation function curve of interference signal for gaussian center positioning. Under the influence of typical error sources, the measurement accuracy of this method is simulated and analyzed. Finally, based on the method proposed in this paper, a comparative measurement experiment of 1.8µm standard step is carried out with ZYGO commercial interferometer. The simulation and experimental results show that the algorithm has good robustness and effectiveness.

Citation Download Citation

Weiwei Chen, Yupeng Xiong, and Shanyong Chen "Surface topography reconstruction method based on modulation of white light interference signal", Proc. SPIE 12921, Third International Computing Imaging Conference (CITA 2023), 129214H (6 November 2023); https://doi.org/10.1117/12.2691822

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Modulation

Optical path differences

Ferroelectric materials

Light sources

Computer generated holography

Error analysis

Interference (communication)

Show All Keywords

Keywords/Phrases

Search In:

Publication Years