A flexible 3-axis force sensor for robotic tactile applications

Yiding Gu; Ting Zhang; Shibin Li

doi:10.1117/12.3010682

1 December 2023 A flexible 3-axis force sensor for robotic tactile applications

Yiding Gu, Ting Zhang, Shibin Li

Proceedings Volume 12940, Third International Conference on Control and Intelligent Robotics (ICCIR 2023); 1294027 (2023) https://doi.org/10.1117/12.3010682
Event: Third International Conference on Control and Intelligent Robotics (ICCIR 2023), 2023, Sipsongpanna, China

Abstract

3-axis force sensors for both normal and shear force sensing have a promising prospect in the field of robotic applications. In this article, a novel flexible 3-axis force sensor was fabricated. The sensor is featured by a three-capacitor architecture composed of two asymmetric electrode levels separated by a microcone structured dielectric layer. The sensor showed a favorable normal force sensitivity of 2 kPa^-1 in the range of 0-100 Pa and a highly linear response to shear force in the range of 0-0.5 N with a sensitivity of 0.063 ^N-1. The sensor also demonstrates reliable sensing performance on both planar and curved states in cyclic test.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yiding Gu, Ting Zhang, and Shibin Li "A flexible 3-axis force sensor for robotic tactile applications", Proc. SPIE 12940, Third International Conference on Control and Intelligent Robotics (ICCIR 2023), 1294027 (1 December 2023); https://doi.org/10.1117/12.3010682

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