Pattern-based in-design fixing for improving design for manufacturability (DFM) rule compliance

Lynn T. N. Wang; Ariel de Jesus Reyes Ruiz; Teodora Nicolae; Ivan Tanev; Klaus-Peter Johnsen; David Villarreal; Fadi Batarseh

doi:10.1117/12.3010901

11 April 2024 Pattern-based in-design fixing for improving design for manufacturability (DFM) rule compliance

Lynn T. N. Wang, Ariel de Jesus Reyes Ruiz, Teodora Nicolae, Ivan Tanev, Klaus-Peter Johnsen, David Villarreal, Fadi Batarseh

Author Affiliations +

Proceedings Volume 12954, DTCO and Computational Patterning III; 1295410 (2024) https://doi.org/10.1117/12.3010901
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Abstract

A pattern replacement in-design auto-fixing methodology, called MAS-POP, is developed to increase the scores calculated by the Manufacturability Analysis and Scoring (MAS) tool, improving the compliance with DFM rules. A library of patterns is developed using pattern classification automation, converting multiple types of Back-End-Of-Line (BEOL) DFM rules to patterns: via-metal line end enclosure, metal 2 tip-to-tip spacing, and metal area. Corresponding fixing hints are prescribed for each pattern. Once the library of patterns and the associated fixing hints have been developed, they are integrated with the router to utilize its pattern replacement feature. This insertion identifies matching patterns and fixes the violations by applying the prescribed fixing hints, improving the usage of the DFM rules and enhancing the MAS scores. The MAS-POP methodology is demonstrated on routed designs. Results show that for a 200 x 200 um2 block, three via-metal line end enclosure patterns reduce the number of DFM violations from 12.5k to 360 on one 2x metal layer, with a small runtime impact.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lynn T. N. Wang, Ariel de Jesus Reyes Ruiz, Teodora Nicolae, Ivan Tanev, Klaus-Peter Johnsen, David Villarreal, and Fadi Batarseh "Pattern-based in-design fixing for improving design for manufacturability (DFM) rule compliance", Proc. SPIE 12954, DTCO and Computational Patterning III, 1295410 (11 April 2024); https://doi.org/10.1117/12.3010901

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