A mathematical model for high precision laser beam figuring of fused silica based on densification effect

Yichi Han; Songlin Wan; Xiaocong Peng; Chaoyang Wei; Jianda Shao

doi:10.1117/12.2692235

18 December 2023 A mathematical model for high precision laser beam figuring of fused silica based on densification effect

Yichi Han, Songlin Wan, Xiaocong Peng, Chaoyang Wei, Jianda Shao

Author Affiliations +

Proceedings Volume 12959, AOPC 2023: Laser Technology and Applications; and Optoelectronic Devices and Integration; 1295903 (2023) https://doi.org/10.1117/12.2692235
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

Laser beam figuring (LBF), as a processing technology for ultra-precision figuring, is expected to be a key technology for further improving optics performance. Due to the lack of understanding of the multi-physics coupling between laser and fused silica, there is still no existing mechanism to guide nano-precision form correction, which severely restricts its further development. To acquire nanoscale high-precision figuring, accurate control of figuring depth is needed. In this paper, we found that fused silica experienced the densification process, leading to nanoscale volume shrinkage subsidence. Therefore, a mathematical model is established to reveal the mechanism of densification effect on nanoprecision figuring depth. The figuring depth of fused silica irradiated by CO₂ laser is related to heat-affected zone and fictive temperature. The results indicated that the figuring depth exponentially depends on pulse duration and figuring depth levels of nanometer are obtainable with the control of pulse duration. The simulation results of CO₂ LBF were finally compared with the experiment ones, which verified the feasibility of the established model. These studies could provide guidance for the optimization of parameter selection and the improvement of LBF technology.

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Yichi Han, Songlin Wan, Xiaocong Peng, Chaoyang Wei, and Jianda Shao "A mathematical model for high precision laser beam figuring of fused silica based on densification effect", Proc. SPIE 12959, AOPC 2023: Laser Technology and Applications; and Optoelectronic Devices and Integration, 1295903 (18 December 2023); https://doi.org/10.1117/12.2692235

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KEYWORDS

Silica

Gas lasers

Carbon monoxide

Mathematical modeling

Thermodynamics

Pulsed laser operation

Laser radiation

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