Performance measurement of FlexRay pupil shaping module in lithography system

Zenghui Yang; Fang Zhang; Jingpei Hu; Zhenxin Huang; Aijun Zeng; Huijie Huang

doi:10.1117/12.3008032

18 December 2023 Performance measurement of FlexRay pupil shaping module in lithography system

Zenghui Yang, Fang Zhang, Jingpei Hu, Zhenxin Huang, Aijun Zeng, Huijie Huang

Proceedings Volume 12963, AOPC 2023: Optical Sensing, Imaging, and Display Technology and Applications; and Biomedical Optics; 129631M (2023) https://doi.org/10.1117/12.3008032
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

The Flexray illumination technology is a crucial resolution enhancement technique for immersion photolithography machines operating at nodes of 28nm and below. The Flexray pupil shaping Module is the key component of this pupil shaping technique. This module enables the generation of arbitrary illumination modes by adjusting the angular spectrum of the beam through a micro mirror array (MMA). To meet the requirements of optical characteristic detection, a multiparameter detection method has been proposed. The optical performance parameters, including polar non-balance, opening angle, azimuth angle, and ellipticity, are simultaneously obtained by imaging the intensity distribution on the pupil plane. Experimental measurements and analysis of illumination shapes using the Flexray Pupil Shaping Module have been conducted. The experimental results demonstrate that this measurement method can be applied to test the performance of the Flexray Pupil Shaping Module in lithography system.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zenghui Yang, Fang Zhang, Jingpei Hu, Zhenxin Huang, Aijun Zeng, and Huijie Huang "Performance measurement of FlexRay pupil shaping module in lithography system", Proc. SPIE 12963, AOPC 2023: Optical Sensing, Imaging, and Display Technology and Applications; and Biomedical Optics, 129631M (18 December 2023); https://doi.org/10.1117/12.3008032

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