Design of flexible MEMS sensor array and data acquisition system

Chunyan Tang; Huihui Guo; Tingting Liu

doi:10.1117/12.3014743

4 March 2024 Design of flexible MEMS sensor array and data acquisition system

Chunyan Tang, Huihui Guo, Tingting Liu

Proceedings Volume 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023); 129811D (2024) https://doi.org/10.1117/12.3014743
Event: 9th International Symposium on Sensors, Mechatronics, and Automation (ISSMAS 2023), 2023, Nanjing, China

Abstract

Surface fluctuating pressure is one of the most important parameters to characterize the boundary layer and the flow condition near the wall of the body, and it is an important basis for studying the turbulent boundary layer structure and its development, and grasping the boundary layer separation, turning and other flow states. To predict and control the hydrodynamic noise of the underwater body, it is necessary to accurately measure the turbulent pulsation pressure distribution on the curved surface of the attached body or model. For the measurement of pulsation pressure on the curved surface of a small-volume body model, a flexible MEMS pulsation pressure sensor line array that can be bent by 0°~5° has been developed, which consists of 32 MEMS microphones, a flexible circuit board, and a metal mask, with a volume of 170 mm×60 mm×1 mm, and the detection sensitivity of a single array element is 12.6 mV/Pa, with a wide frequency range of 100 Hz-10 KHz. At the same time, the FPGA-based control circuit and LABVIEW-based upper computer display interface are proposed to realize the waveform display and data storage of multiple pulsating pressure signals. The amplitude consistency of the flexible sensor array and the reliability of the acquisition system was verified using B&K microphones and NI acquisition cards. The results show that the amplitude difference between the array elements is within 2dB, indicating that the array has good linearity; the amplitude difference between the acquisition system and the NI acquisition card acquisition is better than ±2 %. Analyzing the conclusions, it can be seen that the whole system shows reliability in the process of measuring pulsating pressure signals.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chunyan Tang, Huihui Guo, and Tingting Liu "Design of flexible MEMS sensor array and data acquisition system", Proc. SPIE 12981, Ninth International Symposium on Sensors, Mechatronics, and Automation System (ISSMAS 2023), 129811D (4 March 2024); https://doi.org/10.1117/12.3014743

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KEYWORDS

Detector arrays

Sensors

Design

Microelectromechanical systems

Data acquisition

Signal processing

Analog to digital converters

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