High conductivity multi-channel AlGaN/AlN/GaN heterostructure for underwater blue light detection

Yuebo Liu; QiuLing Qiu; Zesheng Lv; Honghui Liu

doi:10.1117/12.3013635

30 April 2024 High conductivity multi-channel AlGaN/AlN/GaN heterostructure for underwater blue light detection

Yuebo Liu, QiuLing Qiu, Zesheng Lv, Honghui Liu

Proceedings Volume 13153, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Technologies in Optical Systems; 1315306 (2024) https://doi.org/10.1117/12.3013635
Event: Sixth Conference on Frontiers in Optical Imaging Technology and Applications (FOI2023), 2023, Nanjing, JS, China

Abstract

AlGaN/GaN heterostructures is a promising wide-bandwidth semiconductor material for underwater blue light detection due to their unique physical properties. Nevertheless, due to the thin two-dimensional electron gas (2DEG) at the heterostructure interface, the contact resistance remains relatively high. To reduce the contact resistance and improve the potential of AlGaN/GaN heterostructures in high-power and high-frequency electronic devices, multi-channel AlGaN/GaN heterostructures were designed and manufactured in this research. The carrier distribution and distribution of Al, Ga and N elements in the multi-channel AlGaN/GaN heterostructures were characterized. Moreover, the effect of polarization charge on carrier distribution was analysed using energy band theory. The results indicate that multi-channel AlGaN/GaN heterostructures can effectively reduce the contact resistance of devices and that several parallel 2DEGs are present inside the device. The polarisation charge at the heterostructure interface results in an uneven carrier distribution in each channel region. This work is helpful for the application of AlGaN/GaN to underwater blue light detectors.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuebo Liu, QiuLing Qiu, Zesheng Lv, and Honghui Liu "High conductivity multi-channel AlGaN/AlN/GaN heterostructure for underwater blue light detection", Proc. SPIE 13153, Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Technologies in Optical Systems, 1315306 (30 April 2024); https://doi.org/10.1117/12.3013635

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available