Paper
1 December 1990 Deposition methods and process techniques for the fabrication of electrochromic all-solid-state devices
Klaus Muecke, Frank Boehm, Thomas Gambke, Clemens R. Ottermann, Klaus Bange
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Abstract
The electrochromic behavior of all solid state devices (ASSDs) is connected with deposition methods and process techniques for production. Cathodically and anodically colored electrochromic materials and solid state electrolytes are compared and the influence of films prepared by reactive evaporation and reactive sputtering is described. In addition, the general electrochemical behavior of films is discussed, whiéh are produced by chemical vapor deposition, dip coating, electrodeposition and anodic oxidation.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Klaus Muecke, Frank Boehm, Thomas Gambke, Clemens R. Ottermann, and Klaus Bange "Deposition methods and process techniques for the fabrication of electrochromic all-solid-state devices", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22410
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Cited by 3 scholarly publications.
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KEYWORDS
Thin films

Oxides

Deposition processes

Sputter deposition

Electrodes

Tungsten

Solids

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