Electron-rain-assisted deposition of optical thin films

Jiu Lin Zhou; Zi Ma; Qian Ru Liu

doi:10.1117/12.22373

1 December 1990 Electron-rain-assisted deposition of optical thin films

Jiu Lin Zhou, Zi Ma, Qian Ru Liu

Proceedings Volume 1323, Optical Thin Films III: New Developments; (1990) https://doi.org/10.1117/12.22373
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

A hollow cathode electron/ion source with permanent-magnet-field was introduced to assist depositing oxidemetal optical coatings. The refractive index ,absoption and scatter of as -deposited layers arediscussed. It wasfound that the optical loss (absoption and scatter) decreased under proper depositing conditions. The optirnumevaporating parameters were obtained through orthogonal experiments.

Citation Download Citation

Jiu Lin Zhou, Zi Ma, and Qian Ru Liu "Electron-rain-assisted deposition of optical thin films", Proc. SPIE 1323, Optical Thin Films III: New Developments, (1 December 1990); https://doi.org/10.1117/12.22373

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