Electrical probe diagnostics for processing discharges

Thomas D. Mantei

doi:10.1117/12.48939

1 March 1991 Electrical probe diagnostics for processing discharges

Thomas D. Mantei

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48939
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

This paper is intended to provide an overview of Langmuir probe diagnostics for process plasmas. The discussion will focus on plane and cylindrical single current collecting probes. Methods will be presented for the determination of the plasma potential floating potential electron and ion densities electron temperature and electron energy distribution function. Common problems and pitfalls will also be discussed.

Citation Download Citation

Thomas D. Mantei "Electrical probe diagnostics for processing discharges", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48939

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