Microcomputer-based real-time monitoring and control of single-wafer processing

John R. Hauser; Ronald S. Gyurcsik

doi:10.1117/12.48928

1 March 1991 Microcomputer-based real-time monitoring and control of single-wafer processing

John R. Hauser, Ronald S. Gyurcsik

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48928
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Low cost microcomputers are an attractive approach for monitoring and control of future semiconductor processing equipment. A wide variety of low-cost off-the-shelfl/O boards are available for use with industry standard PCs. Such an approach is being implemented in a three-module singlewafer cluster-tool approach for forming a gate stack of oxide nitride and polysilicon. This work discusses hardware and software approaches for such a cluster tool and discusses some of the advantages of in-situ real-time process monitoring and control.

Citation Download Citation

John R. Hauser and Ronald S. Gyurcsik "Microcomputer-based real-time monitoring and control of single-wafer processing", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48928

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