Application and integration of a focused ion beam circuit repair system

John A. Lange; Chris Allen

doi:10.1117/12.47342

1 August 1991 Application and integration of a focused ion beam circuit repair system

John A. Lange, Chris Allen

Proceedings Volume 1465, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing; (1991) https://doi.org/10.1117/12.47342
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

The use of focused ion beam (FIB) circuit repair systems has drastically affected the entire design cycle of modern integrated circuits. Product analysis is changing as well with the ability of a focussed ion beam system to make very accurate cuts on a die and then image the layers using differentiation by the primary ion beam. Transmission electron microscopy is also being positively affected by this new technique due to its ability to produce thinner samples with more positive location than were available by previous techniques. In order to maximize the return, this type of system is best utilized by many operators rather than a select dedicated group. The applications and the organization of use of one such system is described in the deign debug phase of the advanced microprocessor, the Motorola MC68040, along with some suggestions for future directions of focused ion beam machines.

Citation Download Citation

John A. Lange and Chris Allen "Application and integration of a focused ion beam circuit repair system", Proc. SPIE 1465, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing, (1 August 1991); https://doi.org/10.1117/12.47342

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available