Formation of titanium nitride films by Xe+ ion-beam-enhanced deposition in a N2 gas environment

Xi Wang; Gen Qing Yang; Xiang Huai Liu; Zhi Hong Zheng; Wei-Shi Huang; Zu Yao Zhou; Shichang Zou

doi:10.1117/12.47317

1 November 1991 Formation of titanium nitride films by Xe⁺ ion-beam-enhanced deposition in a N₂ gas environment

Xi Wang, Gen Qing Yang, Xiang Huai Liu, Zhi Hong Zheng, Wei-Shi Huang, Zu Yao Zhou, Shichang Zou

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47317
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

A new method in which electron beam evaporation of titanium and bombardment with 40 keV Xe⁺ ion beam (Xe⁺-IBED) were done simultaneously in a N₂ gas environment, has been developed to prepared titanium nitride films. It was confirmed that the xenon content in the films is very low and the N to Ti elemental ratios of the films approach unit. The films are mainly composed of TiN polycrystalline. The hardness of the films reaches 2200 kgmm^-2, higher than that of films prepared by 40 keV N⁺-IBED. Moreover, some industrial applications of Xe⁺-IBED titanium nitride films have been reported.

Citation Download Citation

Xi Wang, Gen Qing Yang, Xiang Huai Liu, Zhi Hong Zheng, Wei-Shi Huang, Zu Yao Zhou, and Shichang Zou "Formation of titanium nitride films by Xe⁺ ion-beam-enhanced deposition in a N₂ gas environment", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47317

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available