Ion implantation of diamond-like carbon films

Jin Zhong Xiang; Zhi Hao Zheng; Changgeng Liao; Jing Xiong; Yong Qiang Wang; Fang-Qing Zhang

doi:10.1117/12.47193

1 November 1991 Ion implantation of diamond-like carbon films

Jin Zhong Xiang, Zhi Hao Zheng, Changgeng Liao, Jing Xiong, Yong Qiang Wang, Fang-Qing Zhang

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47193
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Diamond-like carbon (DLC) films (a-C:H) were implanted by 140 keV and 110 keV Ar ion beams. The characteristics of the implanted films decreased dramatically under a dose of 2 X 10¹⁶ Ar/cm². IR spectra and optical gap Epot were measured. It was found that the SP² and SP³ components decreased due to the loss of hydrogen during implantation, and the ratio of components SP² bonds to SP³ bonds increased with the ion dose. And the optical gap Epot decreased from 1.46 eV to 0.83 eV. The hydrogen (bonded and unbonded) contents in the films were measured with the nuclear resonant reaction ¹H (¹⁹F,) ¹⁶O. It is shown that hydrogen plays an important role in affecting some properties of DLC films.

Citation Download Citation

Jin Zhong Xiang, Zhi Hao Zheng, Changgeng Liao, Jing Xiong, Yong Qiang Wang, and Fang-Qing Zhang "Ion implantation of diamond-like carbon films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47193

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