New results on proton nuclear magnetic resonance of a-SiN:H films

Ji Shen Wang; Chun Fang Xu

doi:10.1117/12.47337

1 November 1991 New results on proton nuclear magnetic resonance of a-SiN:H films

Ji Shen Wang, Chun Fang Xu

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47337
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

In this paper, results of proton magnetic resonance for hydrogenated amorphous silicon nitrides (PECVD a-SiN:H) films are presented. The results are different from those previously reported by other authors.

Citation Download Citation

Ji Shen Wang and Chun Fang Xu "New results on proton nuclear magnetic resonance of a-SiN:H films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47337

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