Spatial frequency response for an optical profiler

R. Anthony Auriemma; Joseph Bietry; Thomas C. Bristow; Gary Wagner

doi:10.1117/12.134866

1 January 1992 Spatial frequency response for an optical profiler

R. Anthony Auriemma, Joseph Bietry, Thomas C. Bristow, Gary Wagner

Proceedings Volume 1531, Advanced Optical Manufacturing and Testing II; (1992) https://doi.org/10.1117/12.134866
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

This paper presents a general method for measuring the frequency response of a surface profiling instrument. One important consequence of this work is the discussion of the importance of the modification of surface spatial frequencies by the measuring instrument. The method uses a step height sample to characterize the impulse instrument, and power spectrum response. Experimental measurements are shown for a variety of focusing objectives. The results show that the half power bandwidth provides a good characterization of the high spatial frequency limit of a surface profiler.

Citation Download Citation

R. Anthony Auriemma, Joseph Bietry, Thomas C. Bristow, and Gary Wagner "Spatial frequency response for an optical profiler", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134866

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