Effects of interfacial modifications on diamond film adhesion

Jeffrey F. DeNatale; John F. Flintoff; Alan B. Harker

doi:10.1117/12.48278

1 December 1991 Effects of interfacial modifications on diamond film adhesion

Jeffrey F. DeNatale, John F. Flintoff, Alan B. Harker

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48278
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Microlithographic surface patterning has been investigated as a means of improving diamond film adhesion on noncompatible substrates. This technique produces significant improvements in film adhesion beyond identical unpatterned substrates, although sufficient film stresses can develop to induce subsurface substrate fracture. The substrate etching geometry can be chosen to simultaneously produce an antireflective surface relief.

Citation Download Citation

Jeffrey F. DeNatale, John F. Flintoff, and Alan B. Harker "Effects of interfacial modifications on diamond film adhesion", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48278

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