X-ray multilayer-coated reflection gratings: theory and applications

Michel Neviere; Antonius J. F. den Boggende

doi:10.1117/12.49407

1 October 1991 X-ray multilayer-coated reflection gratings: theory and applications

Michel Neviere, Antonius J. F. den Boggende

Proceedings Volume 1545, International Conference on the Application and Theory of Periodic Structures; (1991) https://doi.org/10.1117/12.49407
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Among the various rigorous electromagnetic methods previously developed in order to compute and optimize grating efficiencies, Differential Formalism turns out to be the only one capable of dealing with reflection gratings in the x ray region. Not only can the method tackle bare gratings, but it is generalized in order to handle a multilayer stack deposited on top of a blazed grating. This can be a classical stack of equal pairs of dielectric and absorber, but the method can also deal with an arbitrary number of layers with arbitrary thicknesses varying from bottom to top. Contrary to the classical stacks which give high efficiencies in a narrow range of incidence or wavelength, the second type of stacks can be optimized in order to obtain a broadband efficiency curve. It is shown that with the grazing incidence angles used in the x ray domain the reflection of the multilayer structure cannot be considered to be decoupled from the diffraction of the groove profile. Consequently, a full electromagnetic study has to be carried out for the entire device in order to get reliable results.

Citation Download Citation

Michel Neviere and Antonius J. F. den Boggende "X-ray multilayer-coated reflection gratings: theory and applications", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); https://doi.org/10.1117/12.49407

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available