Performance of milliKelvin Si bolometers as x-ray and exotic particle detectors

C. C. Zammit; Timothy J. Sumner; M. J. Lea; P. Fozooni; Ian D. Hepburn

doi:10.1117/12.48345

1 October 1991 Performance of milliKelvin Si bolometers as x-ray and exotic particle detectors

C. C. Zammit, Timothy J. Sumner, M. J. Lea, P. Fozooni, Ian D. Hepburn

Proceedings Volume 1549, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy II; (1991) https://doi.org/10.1117/12.48345
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Silicon bolometers are currently under development for milliKelvin operation; these devices are being produced using Si wafer fabrication technology. The design and performance of individual bolometers, using doped layers with a thickness in the range 0.1 to 3 (mu) , are described. The use of epitaxial growth to replace ion implantation for improved performance is described and initial results reported.

Citation Download Citation

C. C. Zammit, Timothy J. Sumner, M. J. Lea, P. Fozooni, and Ian D. Hepburn "Performance of milliKelvin Si bolometers as x-ray and exotic particle detectors", Proc. SPIE 1549, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy II, (1 October 1991); https://doi.org/10.1117/12.48345

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