High-power XeCl excimer lasers

Gennady A. Mesyats; Yu. I. Bychkov; Boris M. Kovalchuk

doi:10.1117/12.58997

1 May 1992 High-power XeCl excimer lasers

Gennady A. Mesyats, Yu. I. Bychkov, Boris M. Kovalchuk

Proceedings Volume 1628, Intense Laser Beams; (1992) https://doi.org/10.1117/12.58997
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

The results of research and development projects on XeCl lasers at the Institute of High Current Electronics (Tomsk) are presented. In terms of radiation energy, XeCl lasers compare unfavorably with KrF lasers. However, XeCl lasers have an advantage in that their active medium is less corrosive, so they are more useful in laboratory conditions.

Citation Download Citation

Gennady A. Mesyats, Yu. I. Bychkov, and Boris M. Kovalchuk "High-power XeCl excimer lasers", Proc. SPIE 1628, Intense Laser Beams, (1 May 1992); https://doi.org/10.1117/12.58997

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