Paper
1 June 1992 Effect of condenser tilt on projection images produced by a phase-shifting mask
Tsuneo Terasawa, Norio Hasegawa, Souichi Katagiri, Katsunobu Hama
Author Affiliations +
Abstract
The effects of condenser tilt on the imaging characteristics of optical projection exposure systems for lithography are investigated analytically and experimentally. For the focus dependence of images, the difference between a phase-shifting mask and a conventional transmission mask is examined. Condenser tilt effects are explored by displacing the source images formed on the entrance pupil of a projection lens. Condenser tilt is shown to shift periodic line pattern images when the image plane is out of focus. For fine features near the resolution limit of the projection lens, the direction of image shift that occurs with a phase- shifting mask is shown to be opposite the shift that occurs with a transmission mask. For fine features, condenser tilt is also shown to diminish the image contrast obtained with phase-shifting mask and increase the contrast obtained with transmission mask.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tsuneo Terasawa, Norio Hasegawa, Souichi Katagiri, and Katsunobu Hama "Effect of condenser tilt on projection images produced by a phase-shifting mask", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130314
Lens.org Logo
CITATIONS
Cited by 4 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Photomasks

Phase shifts

Optical lithography

Semiconducting wafers

Wafer-level optics

Analytical research

Light

RELATED CONTENT


Back to Top