First measuring results concerning a new thin-film absolute radiometer

E. Kessler; Juergen E. Mueller; F. Voelklein; M. Pawlak; Klaus Moestl; Friedhelm Brandt

doi:10.1117/12.140164

9 February 1993 First measuring results concerning a new thin-film absolute radiometer

E. Kessler, Juergen E. Mueller, F. Voelklein, M. Pawlak, Klaus Moestl, Friedhelm Brandt

Proceedings Volume 1712, 14th Symposium on Photonic Measurement; (1993) https://doi.org/10.1117/12.140164
Event: 14th Symposium of the TC2 on Photonic Measurements, 1992, Sopron, Hungary

Abstract

In using silicon integrated-circuit technology now, we have developed a new detector for the absolute measurement of radiation fluxes by combining a thin-film thermopile with a (meandered) heating element arranged within the receiving area system following our former thin-film absolute radiometer conception from 1980. The sensing junctions and legs of the thermopile and the heater are supported on a thin Si₃N₄/SiO₂ membrane formed by anisotropic etching of the Si base material. The multijunction thin-film thermopile is fabricated from BiSb and Sb in a multilayer technique by microlithographic methods. The 76 sensing junctions are arranged on the periphere of the receiving area 7 mm in diameter. The membrane and chip dimensions are 8 X 8 mm² and 12.5 X 12.5 mm², resp. It is intended to minimize both the temperature coefficient (TC) of the responsivity and of the calibration of the device. First measuring results of responsivity of the detector, its TC, linearity, time constant and the local distribution of responsivity are represented and possibilities are shown to improve these parameters by choosing appropriate materials for the heater as well as the thermopile.

Citation Download Citation

E. Kessler, Juergen E. Mueller, F. Voelklein, M. Pawlak, Klaus Moestl, and Friedhelm Brandt "First measuring results concerning a new thin-film absolute radiometer", Proc. SPIE 1712, 14th Symposium on Photonic Measurement, (9 February 1993); https://doi.org/10.1117/12.140164

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