Optimized replication of interferometrically generated deep diffractive structures by embossing into thermoplastics

Günter Lensch; Peter Lippert; Horst Kreitlow; Christel Budzinski

doi:10.1117/12.142821

15 April 1993 Optimized replication of interferometrically generated deep diffractive structures by embossing into thermoplastics

Günter Lensch, Peter Lippert, Horst Kreitlow, Christel Budzinski

Author Affiliations +

Proceedings Volume 1780, Lens and Optical Systems Design; 17800R (1993) https://doi.org/10.1117/12.142821
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

New optical elements can be realized interferometrically by generating holographic diffractive structures. For lasers in the infrared spectral region the rulings of these structures need to be 2 to 5 times deeper than in common uses. By structuring photoresists holographically, varying different parameters, ruling depths of 24 microns and depth to grating constants of 1.5 could be performed. These structures had been applied as masks to reactive ion etching in glass and copper. For economic embossing replication techniques nickel stampers had been manufactured by electroforming the diffractive photoresist structures. Optimization of the embossing parameters has been carried out successfully regarding different thermoplastic materials and the achievable diffraction efficiency.

Citation Download Citation

Günter Lensch, Peter Lippert, Horst Kreitlow, and Christel Budzinski "Optimized replication of interferometrically generated deep diffractive structures by embossing into thermoplastics", Proc. SPIE 1780, Lens and Optical Systems Design, 17800R (15 April 1993); https://doi.org/10.1117/12.142821

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available