Specifying excimer beam uniformity

Chris Christian Abele; Jenifer Lynn Bunis; George F. Caudle; Gary K. Klauminzer

doi:10.1117/12.143846

22 April 1993 Specifying excimer beam uniformity

Chris Christian Abele, Jenifer Lynn Bunis, George F. Caudle, Gary K. Klauminzer

Proceedings Volume 1834, Laser Energy Distribution Profiles: Measurement and Applications; (1993) https://doi.org/10.1117/12.143846
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Most excimer beams are rectangular and have a top hat profile (flat top, steeply sloped sides) in the longer, horizontal dimension, with a near Gaussian profile in the vertical dimension. These rectangular beams are suitable for large area materials processing applications that require a certain degree of beam uniformity at the workpiece. Beam uniformity is usually described in terms of an allowable percentage variation in the energy density, or fluence, at the workpiece. This allowable variation is often referred to as the process window, which is often used to define the uniformity requirements of the excimer beam. But all excimer beams are not equal, and a beam which may be suitably uniform for one application may not be uniform enough for a different application. Thus, a knowledge of the degree of beam uniformity is very important when evaluating a laser for a given application. We have developed two beam uniformity specifications: the Top Hat Factor and Energy Fraction at 80% of peak fluence. We describe the development of these specifications and how they can be used to evaluate an excimer laser beam.

Citation Download Citation

Chris Christian Abele, Jenifer Lynn Bunis, George F. Caudle, and Gary K. Klauminzer "Specifying excimer beam uniformity", Proc. SPIE 1834, Laser Energy Distribution Profiles: Measurement and Applications, (22 April 1993); https://doi.org/10.1117/12.143846

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