PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
D. Korzec,H.-M. Keller, andJ. Engemann
"Performance characteristics of integrated low-energy broad ion beam extraction optics", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155692
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
D. Korzec, H.-M. Keller, J. Engemann, "Performance characteristics of integrated low-energy broad ion beam extraction optics," Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155692