Measurement and analysis of scatter from rough surfaces

John C. Stover; Marvin L. Bernt; Eugene L. Church

doi:10.1117/12.189225

7 October 1994 Measurement and analysis of scatter from rough surfaces

John C. Stover, Marvin L. Bernt, Eugene L. Church

Proceedings Volume 2260, Stray Radiation in Optical Systems III; (1994) https://doi.org/10.1117/12.189225
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The technique of characterizing the surface roughness of smooth, clean, front surface reflectors from BRDF measurements is in common use and has been well documented in the literature. It relies on using the Rayleigh-Rice vector perturbation theory to obtain the surface power spectral density function (or PSD) from which surface statistics may be found. These calculations are restricted to smooth surfaces only, as defined by the Rayleigh criterion. A number of potential industrial applications that would benefit from the fast, non-contact aspects of scatter/roughness characterization have not been implemented because the smooth surface restriction is clearly violated. This paper offers a brief arm-waving explanation of why BRDF cannot be used to obtain the PSD for rough surfaces, explores increasing the wavelength and/or the incident angle as measurement techniques to extend the PSD (from BRDF) calculation to rougher surfaces, and presents data showing that TIS measurements (which do not require that the PSD be calculation) can be used to find the rms roughness of surfaces are less severely limited by the impact of the smooth surface criterion.

Citation Download Citation

John C. Stover, Marvin L. Bernt, and Eugene L. Church "Measurement and analysis of scatter from rough surfaces", Proc. SPIE 2260, Stray Radiation in Optical Systems III, (7 October 1994); https://doi.org/10.1117/12.189225

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