Fabrication of two-dimensional rough surfaces for light scattering and polarization measurements

Michel A. Josse; Zu-Han Gu

doi:10.1117/12.186657

14 September 1994 Fabrication of two-dimensional rough surfaces for light scattering and polarization measurements

Michel A. Josse, Zu-Han Gu

Proceedings Volume 2265, Polarization Analysis and Measurement II; (1994) https://doi.org/10.1117/12.186657
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

The fabrication of characterized rough surfaces on photoresist is described. The technique used here can be separated into tow parts: first, a photoresist coating, generally 5 to 15 microns thick, is deposited on a flat glass substrate and baked in an oven; second, the plate is exposed, one line at a time, by a laser beam in a raster scanning method. Plate displacement is controlled by a PC computer in order to create the desired structure on the photoresist. Several deterministic and randomly rough gratings have been fabricated and characterized with a stylus profilometer.

Citation Download Citation

Michel A. Josse and Zu-Han Gu "Fabrication of two-dimensional rough surfaces for light scattering and polarization measurements", Proc. SPIE 2265, Polarization Analysis and Measurement II, (14 September 1994); https://doi.org/10.1117/12.186657

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