Photoemission from thin oxide layers amplified by an electric field

Jadwiga Olesik; Bogdan Calusinski; Zygmunt Olesik

doi:10.1117/12.186644

14 September 1994 Photoemission from thin oxide layers amplified by an electric field

Jadwiga Olesik, Bogdan Calusinski, Zygmunt Olesik

Proceedings Volume 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing; (1994) https://doi.org/10.1117/12.186644
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

The work contains results of irivestigatior on photoemission in thin oxide layers in WhiCh internal electric field has been generated. The samples were microscopic glasses covered on both sides by coructirç layers . The internal electric field was created by applyirg a negative polarizing voltage Upot to one of the layers (field emission electrode) , whereas the other one was emitting layer (Sr :Sb, Ti ) . As a result of Upoi. voltage ard i1 lumination, electron were released from the sample . mplite distrib.itior of imp.tlses were measuremed by ampi itie multicharinel analyser (fcr ani1 hinated ard I 1lumirited samples) . For i1 luminated emitting fi ln of Sr :Sb, the frequency of cc*.inth was several times greater then for uni1 luminated samples . For titanium fi las the interity of electron emission was several ord€r of magnitte sml ler than for Sr : Sb. For al1 samples the electron emission increases with growing Upo).. Keywords : photoemission. emission yield, semicorductor, SIS system, electric field. thin oxide layers, work function, optical properties.

Citation Download Citation

Jadwiga Olesik, Bogdan Calusinski, and Zygmunt Olesik "Photoemission from thin oxide layers amplified by an electric field", Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); https://doi.org/10.1117/12.186644

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available