Diamond-like film deposition by laser-initiated dissociation of benzol vapor

Valerie A. Astapenko; Oleg E. Sidoryuk; Elena Ushanova

doi:10.1117/12.203638

1 March 1995 Diamond-like film deposition by laser-initiated dissociation of benzol vapor

Valerie A. Astapenko, Oleg E. Sidoryuk, Elena Ushanova

Proceedings Volume 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference; (1995) https://doi.org/10.1117/12.203638
Event: Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, 1994, Konstanz, Germany

Abstract

A new method of diamond-like film deposition using laser-initiated discharge of benzol vapor is described. The investigation of the discharge parameters was carried out. Dependence of these parameters on characteristics of laser radiation, electric field, and vapor pressure was obtained. It has been shown that this method allows us to produce the coatings with low optical absorption.

Citation Download Citation

Valerie A. Astapenko, Oleg E. Sidoryuk, and Elena Ushanova "Diamond-like film deposition by laser-initiated dissociation of benzol vapor", Proc. SPIE 2498, Laser Methods of Surface Treatment and Modification: ALT '94 International Conference, (1 March 1995); https://doi.org/10.1117/12.203638

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