Micropower supply for electrostatic micromotors

William N. Carr; Hong Jiang

doi:10.1117/12.228648

18 December 1995 Micropower supply for electrostatic micromotors

William N. Carr, Hong Jiang

Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995) https://doi.org/10.1117/12.228648
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2 micrometers CMOS technology. This voltage multiplier circuit utilizes n-type with in a standard 2 micrometers CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high- voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the purpose we used, the power supply can provide approximately 50 V dc output by inputting 5 V dc power and two non-overlapping 0/5 V clock signals. The demonstrated design has application in microbiotic and microactuated systems.

Citation Download Citation

William N. Carr and Hong Jiang "Micropower supply for electrostatic micromotors", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); https://doi.org/10.1117/12.228648

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