Miniature tilting mechanism using piezoelectric actuators

Satoshi Tawara; Takayuki Goto; Kimiyuki Mitsui

doi:10.1117/12.228650

18 December 1995 Miniature tilting mechanism using piezoelectric actuators

Satoshi Tawara, Takayuki Goto, Kimiyuki Mitsui

Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995) https://doi.org/10.1117/12.228650
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

A tilting mechanism using piezoelectric actuators which has two rotation degrees of freedom has been developed. The dimensions of the body of the tilting mechanism are 10 mm in diameter and 24 mm in length. We have achieved the following specifications of the tilting mechanism; +/- 20 degree(s) rotational angle in the orthogonal two axes, 30 seconds of the angular resolution, 10 degree(s)/sec of the maximum rotation speed, and 1.75 Nmm of the maximum torque. This paper describes the structure and the experimental results of the linear actuator and the tilting mechanism.

Citation Download Citation

Satoshi Tawara, Takayuki Goto, and Kimiyuki Mitsui "Miniature tilting mechanism using piezoelectric actuators", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); https://doi.org/10.1117/12.228650

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