Paper
12 April 1996 High-performance deep-red AlAs/AlGaAs VCSELs for applications in sensing
Karlheinz H. Gulden, Michael Moser, Silvia Luscher
Author Affiliations +
Abstract
Vertical cavity surface emitting lasers (VCSELs) are the light source of choice for a broad range of applications in sensing due to their potential for low cost manufacturability and unique optical properties. Tunable low cost, single mode lasers with an emission wavelength around 762 nm are important for applications in oxygen sensing. We present results on top- emitting AlAs/AlGaAs VCSELs with an emission wavelength of 765 nm. Minimum threshold currents of 0.6 mA and threshold voltages of 1.9 V are achieved. The dependence of these characteristics on laser size is determined. VCSELs with an emission window radius of 8 micrometer exhibit threshold currents of 1.5 mA, wallplug efficiencies of 11.2% and a slope efficiency of 0.46 W/A. The maximum output powers exceed 5 mW for large area lasers. These characteristics represent a significant improvement compared to previously published data for VCSELs operating in this wavelength range. The emission wavelength can be tuned by the operating current over a range of 2.7 nm without the appearance of higher order lateral modes. The current tuning coefficients range from 0.38 nm/mA for small area to 0.05 nm/mA for large area devices.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Karlheinz H. Gulden, Michael Moser, and Silvia Luscher "High-performance deep-red AlAs/AlGaAs VCSELs for applications in sensing", Proc. SPIE 2682, Laser Diodes and Applications II, (12 April 1996); https://doi.org/10.1117/12.237649
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Cited by 4 scholarly publications.
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KEYWORDS
Vertical cavity surface emitting lasers

Wet etching

Etching

Semiconducting wafers

Oxygen

Absorption

Aluminum

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