Finger-mounted silicon sensor for providing force feedback information

David J. Beebe; Denice D. Denton; Robert G. Radwin; John G. Webster

doi:10.1117/12.240888

30 May 1996 Finger-mounted silicon sensor for providing force feedback information

David J. Beebe, Denice D. Denton, Robert G. Radwin, John G. Webster

Proceedings Volume 2718, Smart Structures and Materials 1996: Smart Sensing, Processing, and Instrumentation; (1996) https://doi.org/10.1117/12.240888
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

A silicon-based tactile sensor is fabricated and tested on human subjects. The sensor is packaged in a flexible polyimide-based skin which allows the sensor to be mounted on the finger. The sensor is fabricated using anisotropic and isotropic etching, silicon-to-silicon bonding, and other standard microfabrication technologies. The sensor was characterized on the bench. The sensor is capable of withstanding loads in excess of 100 N. Typical output sensitivity is 1.4 mV/V/N. In addition, a dynamic calibration and a tracking experiment were performed on human subjects. For the human subject experiments the sensor was mounted on the distal phalangeal pad of the thumb on the dominant hand. A dual beam strain gage dynamometer was used to measure the actual forces. The force range for the dynamic calibration was based on the maximum acceptable pinch force of the subjects. Sensor design and operation are described. Statistical analysis of the human subject experiment is presented and future work is discussed.

Citation Download Citation

David J. Beebe, Denice D. Denton, Robert G. Radwin, and John G. Webster "Finger-mounted silicon sensor for providing force feedback information", Proc. SPIE 2718, Smart Structures and Materials 1996: Smart Sensing, Processing, and Instrumentation, (30 May 1996); https://doi.org/10.1117/12.240888

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