Hydrogen/oxygen radio-frequency plasma processing of LiNbO3

Hana Turcicova; Jiri Vacik; Jarmila Cervena; Vladimir Zelezny

doi:10.1117/12.246800

19 August 1996 Hydrogen/oxygen radio-frequency plasma processing of LiNbO₃

Hana Turcicova, Jiri Vacik, Jarmila Cervena, Vladimir Zelezny

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246800
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Lithium niobate substrates were processed in plasma of radio-frequency glow discharge in hydrogen and subsequently in oxygen. The modified surface layers were examined using the infrared spectroscopy and ⁶Li depth profiling. It was found that hydrogen plasma treatment enhances the OH band absorption which is explained as hydrogenation of Li- reduced samples. At the same time the sample surface is modified so that the reflectivity increases and the extinction coefficient of a wafer is substantially lowered. The Li-reduction is not higher than 50 percent, but the depth of the modified surface layer extends to about 20 micrometers. It is attributed to a relatively high sample heating caused by plasma which facilitates the Li mobility. A possibility of this method as an alternative technique to the annealed proton exchange is mentioned. An interesting reversed ⁶Li depth profile was observed, i.e. decreasing with depth. The reason of this phenomenon might be a negative surface biasing in plasma, which makes the Li⁺ ions to drift to the surface. It suggests an idea of thus produced 'buried' waveguide.

Citation Download Citation

Hana Turcicova, Jiri Vacik, Jarmila Cervena, and Vladimir Zelezny "Hydrogen/oxygen radio-frequency plasma processing of LiNbO₃", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246800

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