Use of power spectral density (PSD) to specify optical surfaces

Helmut H. Toebben; Gabriele A. Ringel; Frank Kratz; Dirk-Roger Schmitt

doi:10.1117/12.246751

19 August 1996 Use of power spectral density (PSD) to specify optical surfaces

Helmut H. Toebben, Gabriele A. Ringel, Frank Kratz, Dirk-Roger Schmitt

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246751
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

The power spectral density (PSD) is the most appropriate way to characterize the microroughness of a surface with a spatial wavelength range from several centimeters to a few hundred nanometers. Novel concepts to specify optical surfaces using the PSD are discussed. The results are applied to measurements obtained by a n optical heterodyne profilometer, by a mechanical profiler nanostep, and by an atomic force microscope. It is demonstrated that this method could yield a bandwidth independent model for the description of surface parameters.

Citation Download Citation

Helmut H. Toebben, Gabriele A. Ringel, Frank Kratz, and Dirk-Roger Schmitt "Use of power spectral density (PSD) to specify optical surfaces", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246751

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