New heterodyne interferometers using double passing

Pascal Vairac; Bernard Cretin

doi:10.1117/12.250777

18 September 1996 New heterodyne interferometers using double passing

Pascal Vairac, Bernard Cretin

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250777
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

In two-arms interferometers, spurious beams are often cause of instabilities. Resulting multiple-beam interference limit the probe sensitivity. Optical components are usually added to spatially shift or to suppress these `spurious beams' returning inside the interferometer. Experimentally, we have shown that the so-called `spurious beams' returning towards the laser can be successfully used to obtain stable interference. So, we have developed new structures of interferometers based on the reflection of a returning beam on the high-quality front mirror of He-Ne laser. The new structures present several advantages compared with classical interferometers (Michelson or Mach-Zehnder, e.g.). They are more simple and, at least, the same sensitivity has been measured. Alignment is simplified and power balancing is very easy.

Citation Download Citation

Pascal Vairac and Bernard Cretin "New heterodyne interferometers using double passing", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250777

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