Compatible CMOS microsystems for automotive and medical applications

Ralf Kersjes; W. Mokwa

doi:10.1117/12.250703

17 September 1996 Compatible CMOS microsystems for automotive and medical applications

Ralf Kersjes, W. Mokwa

Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250703
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Integration of sensors and electronics on the same substrates becomes more and more important. CMOS circuit design seems to be the most important technique for the monolithic approach. Compared to bipolar circuits power consumption is much lower, compared to BICMOS the process is much less complex therefore having a much lower number of masks. This is very important because inmost cases monolithic integration means additional process steps and by this a higher process complexity. This paper wants to give a few examples for the monolithic approach in the field of physical sensors based on CMOS-technologies for automotive and for medical applications.

Citation Download Citation

Ralf Kersjes and W. Mokwa "Compatible CMOS microsystems for automotive and medical applications", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250703

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