Development and fabrication of a rotary micropump and its industrial and medical applications

Thomas Weisener; Gerald Voegele; Mark Widmann; Carlo Bark; Rolf Dieter Schraft; Axel Bertholds; Andreas Braunschweiler

doi:10.1117/12.250707

17 September 1996 Development and fabrication of a rotary micropump and its industrial and medical applications

Thomas Weisener, Gerald Voegele, Mark Widmann, Carlo Bark, Rolf Dieter Schraft, Axel Bertholds, Andreas Braunschweiler

Proceedings Volume 2882, Micromachined Devices and Components II; (1996) https://doi.org/10.1117/12.250707
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

The development of small pumps in the area of microsystem technology has lead to many different prototypes, mainly using membranes. In contrast to this, a rotary working pump has been developed at Fraunhofer-Institut fuer Produktionstechnik und Automatisierung (IPA) with which both an improvement in output, as well as pressures previously not possible have been reached. After a first prototype pump with an outer diameter of 10 mm an optimized prototype with an outer diameter of only 2.5 mm was fabricated in cooperation with AGIE applying electro-dischange-machining. Presently Fraunhofer IPA is working upon the design of a micromotor with the same functional principles. The applications of the new microhydraulic system are exceedingly numerous and extend from technical to medical products.

Citation Download Citation

Thomas Weisener, Gerald Voegele, Mark Widmann, Carlo Bark, Rolf Dieter Schraft, Axel Bertholds, and Andreas Braunschweiler "Development and fabrication of a rotary micropump and its industrial and medical applications", Proc. SPIE 2882, Micromachined Devices and Components II, (17 September 1996); https://doi.org/10.1117/12.250707

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