Photolithography of integrated optical devices in porous glasses

Edgar A. Mendoza; Daniel P. Robinson; Robert A. Lieberman

doi:10.1117/12.273844

25 April 1997 Photolithography of integrated optical devices in porous glasses

Edgar A. Mendoza, Daniel P. Robinson, Robert A. Lieberman

Proceedings Volume 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices; (1997) https://doi.org/10.1117/12.273844
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

We are developing a completely new technology for the low cost fabrication of integrated optic devices (IODs) in silica glasses. This technology is based on direct photolithographic writing of IODs onto photoactive sol-gel glasses. Waveguide patterns are formed by straightforward photolithographic techniques. Depending on the choice of photosensitive glass, these waveguide patterns can be passive (simply having a higher index of refraction than the surrounding `host' glass) or active (with optical properties that can be influenced by the application of electric or magnetic fields). The simplicity of this process makes it very promising for the fabrication of commercially viable integrated optic devices.

Citation Download Citation

Edgar A. Mendoza, Daniel P. Robinson, and Robert A. Lieberman "Photolithography of integrated optical devices in porous glasses", Proc. SPIE 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices, (25 April 1997); https://doi.org/10.1117/12.273844

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available