Optical displacement measurement using a monolithic Michelson interferometer

Daniel Hofstetter; Hans P. Zappe

doi:10.1117/12.271409

11 April 1997 Optical displacement measurement using a monolithic Michelson interferometer

Daniel Hofstetter, Hans P. Zappe

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271409
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Contactless optical displacement measurement has the potential for a variety of industrial and scientific applications. For highly accurate displacement measurements at distances below 1 m, interferometric methods are preferred over most other methods. This is mainly because of the good resolution and the possibility of doing the measurements in real-time. Furthermore, the use of direct bandgap semiconductor materials also enables the fabrication of a compact interferometer-based device which unites all necessary components, including the light emitter, on a single chip. In this paper, a monolithically integrated optical displacement sensor fabricated in the GaAs/AlGaAs material system is reported. This single chip microsystem is configured as a double Michelson interferometer and comprises a distributed Bragg reflector laser, photodetectors, phase shifters and waveguide couplers. In the course of this paper, we will also briefly discuss possible scientific and industrial applications of such devices.

Citation Download Citation

Daniel Hofstetter and Hans P. Zappe "Optical displacement measurement using a monolithic Michelson interferometer", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271409

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